Dektak 3 ST Surface Profiler
Technical Specifications
|
Vertical Range |
100 Ǻ to 1,310KǺ (0.4 microinch to 2.5 mils) |
|
Vertical Resolution |
1Ǻ/65KǺ, 10Ǻ,/655KǺ, 20Ǻ/1,310KǺ |
|
Scan Length Range |
50 microns to 50 mm (2 mils to 2.5 inches) |
|
Scan Speed Ranges |
Low, Medium, High |
|
Scan Time Range |
3 seconds to 50 seconds |
|
Software Leveling |
Two-point programmable or cursor leveling |
|
Stage Leveling |
Manual (motorized with Auto I model) |
|
Stylus (standard) |
Diamond, 2.5 micron radius |
|
Stylus Tracking Force |
Programmable, 1 mg to 40 mg (0.1-0.4 milliNewton) |
|
Maximum Sample Thickness |
45mm (1.5 inches) |
|
Sample Stage Diameter |
165mm (6.5 inches) |
|
Sample Stage Translation (from center) |
X Axis, m (nches) Y Axis, -76mm, (-3 inches) |
|
Sample Stage Rotation |
360ntinuous |
|
Maximum Sample Weight |
0.5Kg (1 lb.) |
|
Power Requirements |
100/115/200Vac , 50-60Hz, 200Vac |
|
Warm-up Time |
15 minutes recommended for maximum stability |
|
Operating Temperature |
21 (70°F, ) |
|
Zoom Magnification |
60X to 420X (motorized with Auto I) |
|
Camera |
Solid state color video image |
|
Sample Illumination |
Variable intensity white light; IR & UV blocked |
