Hummer 6.2 Sputter Coater
The Hummer 6.2 is a system that performs controlled cold temperature deposition for SEM sample preparation, evenly coating irregularly shaped specimens with conductive material while preventing thermal damage.
Uses a process in which ions impacting a metal source dislodge metal atoms, which then spread out through the sputter chamber to evenly and thoroughly coat a sample, with conductive material.
Three different sputtering modes:
- Plating mode (pdf): Used to plate a specimen with a metal; best for SEM sample preparation, uses gold/palladium source.
- Etching mode (pdf): Used to remove material from a specimen by removing non-bonded surface material, providing a clean surface for sputter coating and allowing for better adhesion.
- Plasma mode (pdf): Used to outgas and clean materials before coating.
Standard Features and Specifications:
- 2 nanometer grain size
- Magnetically enhanced sputter head
- 3" diameter sample stage with 2" vertical adjustment
- 22" long x 20" wide x 22" high
- Power output of 0-300 volts, 0-30 milliamps
